At EMSA 2026 Perla Malagò and Stefano Lumetti presented recent advances in magnetic MEMS(Micro-Electro-Mechanical Systems), showcasing technologies that lay the groundwork for two European pilot lines: SUPREME and CHAMP-ION.
Their work addressed a key challenge in MEMS manufacturing: the production of high-performance micromagnets to enable the generation of strong forces within compact volumes. Current fabrication methods face limitations, with a gap between bottom-up microfabrication routes, which result in good magnetic properties and accurate shapes but are usually slow and expensive, and top-down approaches, which can achieve feature sizes of few hundreds of µm but induce surface degradation due to stress or heating that ultimately leads to a loss of remanence and coercivity.
To overcome this challenge, the researchers developed a laser-based micromachining process for manufacturing miniature permanent magnets from neodymium-iron-boron (NdFeB) sintered foils. By using ultrashort laser pulses, they were able to precisely shape the magnets while minimising heat-induced damage, allowing the material to retain magnetic properties close to those of the original bulk magnet. The resulting high-performance micromagnets can be integrated into MEMS devices to provide powerful electromagnetic actuation within a very small footprint.
This breakthrough opens the door to more reliable and efficient magnetic MEMS components.
Malagò and Lumetti’s work showcased know-how and R&D achievements that lay at the intersection of the work that will be executed to develop the SUPREME or CHAMP-ION Pilot Lines.
These Quantum Chip Pilots project are funded under the Chips Joint Undertaking and the European Member States. While SUPREME aims to strengthen Europe’s semiconductor manufacturing capabilities through advanced process technologies and innovation frameworks, CHAMP-ION focuses on establishing a sustainable European pilot line network for the production of high-quality ion-trap quantum chips.
By building on shared know-how, complementary expertise and a common vision for technological advancement, projects such as SUPREME and CHAMP-ION strengthen Europe’s capacity to develop advanced semiconductor solutions and maximize the impact of publicly funded research.
